1 上海大学材料科学与工程学院, 上海 200444
2 中国科学院上海光学精密机械研究所中科院强激光材料重点实验室, 上海 201800
3 中国科学院大学, 北京 100049
采用时域有限差分法研究了硒化锌基底的抛物线型周期阵列仿生微结构的光学性质,重点分析了微结构阵列的周期、高度、占空比和形状轮廓等对反射率的影响,得到了有较好增透效果的结构参数。根据模拟参数进行两次干涉曝光制备掩模,采用反应离子刻蚀技术制备周期阵列微结构。通过场发射扫描电子显微镜对微结构的表面形貌进行表征,并采用傅里叶变换红外光谱仪在中红外波段分别对双面抛光、单面微结构的硒化锌片进行透过率测试。结果表明:单面微结构样品在2~5 μm范围内的整体平均透过率比双面抛光硒化锌基片提高了10%,在2.3 μm处的最大透过率为82%。
衍射 增透微结构 时域有限差分法 干涉曝光
Author Affiliations
Abstract
1 School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
2 CAS Key Laboratory of Materials for Energy Conversion, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
Molybdenum (Mo) thin films, most commonly used as electrical back contacts in Cu(In,Ga)Se2 (CIGS) solar cells, are deposited by rf and dc magnetron sputtering in identical systems to study the discrepancy and growth mechanisms of the two sputtering techniques. The results reveal that though different techniques generally deposit films with different characteristic properties, Mo films with similar structural and physical properties can be obtained at respective suitable deposition conditions. Highly adhesive and conductive Mo films on soda lime glass are further optimized, and the as-fabricated solar cells reach efficiencies as high as 9.4% and 9.1% without an antireflective layer.
310.1860 Deposition and fabrication 040.5350 Photovoltaic 350.6050 Solar energy Chinese Optics Letters
2016, 14(4): 043101
Author Affiliations
Abstract
1 CAS Key Laboratory of Materials for Energy Conversion, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
2 Inorganic Materials Analysis and Testing Center, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
Highly conducting ZnO:Al (AZO) films are normally prepared through substrate heating and post-annealing in reducing atmosphere, which is deleterious to maintain the high transparency of films and the overall so-lar cell performance. Here we fabricate AZO films through one-step sputtering at room temperature using oxygen-deficient targets prepared via double crucible method. The best-performed AZO film achieves a low resistivity of 4.4 × 10-4 . cm, a high haze factor of 35.0%, and optimizes the efficiency of Cu (In, Ga)Se2 solar cell with a high value of 14.15%. This letter demonstrates that oxygen deficiency can induce high surface texture, conductivity, and boost solar cell performance.
000.1570 Chemistry 040.5350 Photovoltaic 160.4670 Optical materials 240.0310 Thin films Chinese Optics Letters
2014, 12(9): 093101
Author Affiliations
Abstract
1 Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, China
2 CAS Key Laboratory of Materials for Energy Conversion, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
3 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Intrinsic zinc oxide films, normally deposited by radio frequency (RF) sputtering, are fabricated by direct current (DC) sputtering. The oxygen-deficient targets are prepared via a newly developed double crucible method. The 800-nm-thick film obtaines significantly higher carrier mobility compareing with that of the 800-nm-thick ZnO film. This is achieved by the widely used RF sputtering, which favors the prevention of carrier recombination at the interfaces and reduction of the series resistance of solar cells. The optimal ZnO film is used in a Cu (ln, Ga) Se2 (CIGS) solar cell with a high efficiency of 11.57%. This letter demonstrates that the insulating ZnO films can be deposited by DC sputtering from oxygen-deficient ZnO targets to lower the cost of thin film solar cells.
氧化锌 薄膜 溅射 扩散阻挡层 太阳能电池 310.6845 Thin film devices and applications 310.7005 Transparent conductive coatings 310.1860 Deposition and fabrication Chinese Optics Letters
2011, 9(10): 103102
